Crystal Grower - FF CZ150의 자동 직경 제어기 설계
Design of Automatic Diameter Controller for Crystal Grower - FF CZ150
정보제어공학과 제어 및 시스템 전공
Crystal Grower FF CZ150 자동직경제어기;
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The PID controller have the simple structure and show the comparatively good control performance. Crystal Grower(FF-CZ150) is melt polycrystalline silicon at the temperature of about 1450 ℃, then grow it into a single crystalline ingot. The automatic diameter control system of the Crystal Grower has a good performance with only PD control. But it contained the integrator the plant which has a long time delay. In this paper, we show the secondary approximate model and applies time delay controller which is good performance for in the long time delay plant. It will be able to improve the response characteristic against a standard input and a load disturbance.