PZT 후막 캔틸레버의 비선형석 공진 거동 및 센서 특성에 관한 연구 : PZT 후막 캔틸레버의 비선형적 공진 거동특성
(A) Study on the Fabrication and Nonlinear Behavior of Resonant Frequency in PZT Thick Film Cantilever
강유전체 마이크로캔틸레버 공진;
- 원문 URL
A PZT (lead zirconia titanate) thick film cantilever was fabricated on SiNx wafer. PZT thick film was deposited by screen printing method. The density of PZT thick film made by screen printing method was increased with PZT sol(0.4 M) infiltration. The resonant frequency of a PZT membrane cantilever was measured for different voltage inputs. The resonant frequency of the PZT thick film cantilever was affected by mechanical structure of the membrane cantilever. This phenomenon is a major factor for measuring mass and viscosity of the PZT thick film cantilever. The simulation result using a commercial simulation tool(CoventorWare^(TM)) and actual result measured by PolyTec equipment of the resonant frequency are compared to be close. With the voltages from 0.08-2.44 kV/mm, it shows that the resonant frequency of the PZT thick film cantilever has relatively nonlinear behavior more than 2 kV/mm. As a cantilever sensor, reliability test also was performed. The resonant frequencies were 12725, 12714, and 12704 Hz for the repeatable input of 0.8, 1.2 and 1.6 Kv/mm were provided. The mean values of displacement were 0.1511, 0.2271, and 0.3177 ㎛ with the variation of ±1.25%. In addition, we expanded its use to a PZT thick film cantilever sensor. Approximately, the change of 10 pg/um of mass was detected after Au thermal evaporation. Additionally, the changes in the degree of viscosity by the addition of glycerol were measured. As the percentage of glycerol increased from 25, 50, 70, and 100%, the resonant frequency and displacement decreased. As well, Q-factor linearly decreased.