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피에조 구동형 정밀 스테이지의 최적화 설계 및 제작 원문보기
Development and optimal design of piezo driven precision motion stage

  • 저자

    정호제

  • 학위수여기관

    경성대학교 일반대학원

  • 학위구분

    국내석사

  • 학과

    메카트로닉스공학과 정밀 모션스테이지 설계

  • 지도교수

    김정현

  • 발행년도

    2014

  • 총페이지

    52

  • 키워드

    micropositioning stage 3D printer;

  • 언어

    kor

  • 원문 URL

    http://www.riss.kr/link?id=T13535302&outLink=K  

  • 초록

    This thesis presents the design, fabrication and implementation of three types of piezo driven motion stages. The first stage is a triple lever aluminum in-plane motion stage which employs a novel cross hinge instead of the conventionally used flexure hinge. Simulation results show that the cross hinge has improved performance in terms of motion amplification and decreased maximum stress. The decreased maximum stress allowed for the design of the triple lever structure which enabled a motion amplification of close to 60X. Moreover, 20nm of motion resolution was achieved by using the parallel structure with PID motion control. The second stage is a in-plane ABS single lever stage fabricated using a 3D printer. Using ABS material allowed for a dramatic decrease in the stress at the hinges which decreased the required force for activating the motion stage. Fabricating the stage using a 3D printer greatly simplifies the cost and complexity of constructing the stage. The third stage is a ABS bridge-type motion stage which converts in-plane motion of the pizeo element into vertical out-of-plane motion using two bridge structures.


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