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The Korean journal of ceramics v.1 no.4, 1995년, pp.204 - 208   피인용횟수: 1

Electrical Properties of $Ba_{1-x}Sr_xTiO_3$ Thin Films Deposited by Metalorganic Chemical Vapor Deposition

Yoon, Jong-Guk  
  • 초록

    The microstructure and electrical propetries were investigated for polycrystalline $Ba^{1-x}Sr_xTiO_3$ (BST) thin films deposited on Pt/Ti/ $SiO_2$ (PTSS) and Pt/MgO(PM) substrates by metalorganic chemical vapor deposition (MOCVD). BST films on PTSS have coulmnar and porous structures, while on PM have an equiaxied and dense structure. The dielectric constant and a dissipation factor of BST films on PTSS and 20 fC/ $\mu \textrm{cm}^3$ on PTSS and 12fC/ $\mu \textrm{cm}^2$ on PM was obtained at an applied electric field of 0.06 MV/cm. Leakage current density of BST films on PM was smaller than that on PTSS. The leakage current density level was about $8\times10^{-8}A/\textrm{cm}^2$ at 0.04MV/cm.


  • 주제어

    MOCVD .   BST .   Electrical properties .   Microstructure.  

  • 참고문헌 (9)

    1. Preparation and Properties of (Ba,Sr)Tio₃Thin Films by RF Magnetron Sputtering , N.Ichinose;T.Ogiwara , Jpn.J.Appl.Phys. / v.32,pp.4115,
    2. Growth and Characterization of Ferroelectric Pb(Zr,Ti)O₃Thin Films by MOCVD Using a 6 inch Single Wafer CVD System , M.Shimizu;M.Fujimoto;T.Katayama;T.Shiosaki;K.Nakaya;M.Fukagawa;E.Tanikawa , Mater.Res.Soc.Symp.Proc. / v.310,pp.255,
    3. Epitaxial Growth of BaTio₃Thin Fims by Organometalic Chemical Vapor Deposition , L.A.Wills;B.W.Wessels;D.S.Richeson;T.J.Marks , Appl.Phys.Lett / v.60,pp.41,
    4. Preparation of Thin Films ($Ba_{o5}Sr_{o5}$)TiO₃by the Laser Ablation Technique and Electrical Properties , S.G.Yoon;J.C.Lee;A.Safari , J.Appl.Phys. / v.76,pp.2999,
    5. Step Coverage and Electrical Properties of (Ba,Sr)TiO₃Films Prepared by LSCVD using TiO(dpm)₂ , T.Kawahara;M.Yamamuka;T.Makita;J.Naka;A.Y.unki;N.Mikami;K.Ono , Jpn.J.of Appl.Phys. / v.33,pp.5129,
    6. Dielectric Properties of (Ba,Sr)Tio₃Thin Films Deposited by RF Sputtering , T.Horikawa;N.Mikami;T.Makita;J.Tanimura;M.Kataoka;K.Sato;M.Nunoshita , Jpn.J.Appl.Phys. / v.32,pp.4126,
    7. C.Barret;T.B.Massalski , Structure of Metals / v.,pp.204,
    8. Epitaxial Growth of SrTio₃/$YBa_{2}Cu_{3}O_{7-x}$ Heterostructures by Plasmaenhanced Metalorganic Chemical Vapor Deposition , S.Liang;C.S.Chern;Z.Q.Shi , Appl.Phys.Lett. / v.64,pp.3563,
    9. Heteroepitaxial Growth of Ba_{1-x}Sr_{x}Tio_{3}/YBa_{3}Cu_{3}O_{7x} by Plasama-Enhanced Metalorganic Chemical Vapor Deposition , C.S.Chern;S.Yoon;A.Safari , Appl.Phys.Lett. / v.64,pp.3181,
  • 이 논문을 인용한 문헌 (1)

    1. Go, Seong-Yong ; Jang, Cheol-Yeong ; Kim, Dong-Jeon ; Kim, Jin-Seop ; Lee, Jae-Sin ; Lee, Jeong-Hui ; Han, Seok-Yong ; Lee, Yong-Hyeon 2001. "Uncooled Pyroelectric Thin-film $(Ba,Sr)TiO_3$ Infrared Detector Thermally Isolated by Dielectric Membrane" 電子工學會論文誌. Journal of the Institute of Electronics Engineers of Korea. SD, 반도체, 38(3): 229~235     

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