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Rigorous coupled-wave analysis of antireflective surface-relief gratings

Han, Chang-Wook    (Department of Physics, Ajou University   ); Cho, Doo-Jin    (Department of Physics, Ajou University   ); Rhee, Bum-Ku    (Department of Physics, Sogang University  );
  • 초록

    Rigorous coupled-wave analysis (RCWA) with a simplified eigenvalue problem is used to investigate the an-tireflective property of one-dimensional surface-relief gratings such as binary gratings, triangular gratings and gratings with triangle-like surface profiles. The convergence of RCWA is investigated by varying the number of layers and the number of space-harmonics used in the computation. For unpolarized light normally incident on a medium of refractive index 1.64 from vaccum, a triangle-like grating shows the reflectivity of $1.6 {\times} 10^{-4}$ in contrast to a minimum reflectivity of $3.8 {\times} 10^{-3}$ for a binary grating. We also study the dependence of reflectivity on the wavelength, and on the angle of incidence for a groove shape and depth which result in minimum reflectivity.


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