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요업학회지 = Journal of the Korean Ceramic Society v.34 no.8, 1997년, pp.834 - 842   피인용횟수: 2

Ion Implantation으로 Ca를 첨가한 단결정 Al2O3의 Crack-like Pore의 Healing 거동 - I. Crack-like Pore의 형성과 Morphological Evolution
Effect of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity Al2O3 Using Micro-lithographic Technique - I. Formation of Crack-like Pore and Its Morphological Evolution

김배연    (인천대학교 재료공학과  );
  • 초록

    Controlled Ca impurity implanted inner crack-like pore in the high purity alumina single crystal, sapphire, had been created by micro-fabrication technique, which includes ion implantation, photo-lithography, Ar ion milling, and hot press technique. The morphological change and the healing of cracklike pore in Ca doped high purity single crystal alumina, sapphire, during high temperature heat treatment in vacuum were observed using optical microscopy. The dot-like surface roughening was developed and hexagon like crystal appeared on inner surface of crack-like pore after heat treatment. Bar type crystals, probably CaO.6Al2O3, were observed on the inner surface after 1 hour heat treatment at 1, 50 $0^{\circ}C$ , but this bar type crystal disappeared after 1 hour heat treatment at 1, $600^{\circ}C$ . This disappearance means that there should be a little increase of Ca solubility limit to alumina at this temperatures.


  • 주제어

    Alumina .   Ca .   Solubility limit .   Crack healing .   Microfabrication .   Lithography.  

  • 참고문헌 (19)

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    2. Grain Boundary Segregation in MgO-Doped $Al_2O_3$ , H. L. Marcus;M. E. Fine , J. Ame. Ceram. Soc. / v.55,pp.568-570,
    3. The Healing of Clevage Cracks in Alkaly Halide Crystals , A. J. Forty;C. T. Forwood , Trans. Brit. Ceram. Soc. / v.62,pp.715-725,
    4. A.M. Glaeser , private communication / v.,pp.,
    5. The Equilibrium Shape of Internal Cavities in Sapphire , J. Choi;D. Kim;B. J. Hockey;S. M. Wiederhorn;A. R. Roosen , J. Ame. Ceram. Soc. / v.80,pp.62-68,
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    7. High-Temperature Healing of Cracklike Flows in Mg- and Ca-Ion-Implanted Sapphire , J. D. Poulers;A M. Glaeser , J. Ame. Ceram. Soc. / v.75,pp.2547-2558,
    8. Observation of Crack Healing in Sodium Chloride Single Crystals at Low Temperatures , S. M. Park;D. R. O'Boyle , J. Mater. Sci. / v.12,pp.840-841,
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    19. Crack Healing in $A_2O_3,\;MgO$, and Related Materials , T.K. Gupta;W.D. Kingery(ed.) , Advances in Ceramics / v.10,pp.750-766,
  • 이 논문을 인용한 문헌 (2)

    1. 1999. "Effect of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique -II. Hexagonal Ligaments and Type of Healing" 요업학회지 = Journal of the Korean Ceramic Society, 36(8): 813~819     
    2. 1999. "Effects of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique-III: Stability of Crack-Like Pore" 요업학회지 = Journal of the Korean Ceramic Society, 36(9): 887~892     

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    9. 2003 "Application of Taguchi Method and Orthogonal Arrays for Optimization of Adhesion of $SrZrO_3$ Coatings on Ag/Bi(2223) Tapes" 한국초전도·저온공학회논문지 = Superconductivity and cryogenics 5 (1): 13~16    
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