본문 바로가기
HOME> 논문 > 논문 검색상세

논문 상세정보

요업학회지 = Journal of the Korean Ceramic Society v.34 no.8, 1997년, pp.897 - 907   피인용횟수: 1

졸겔공정을 이용한 $Bi_{4-x}Sm_xTi_3O_{12}(0<\leqx\geq2)$ 박막제조 및 특성평가
Preparation and Characterization of $Bi_{4-x}Sm_xTi_3O_{12}(0<\leqx\geq2)$ Thin Films Using Sol-Gel Processing

이창민    (인하대학교, 소재연구소, 무기재료공학과   ); 고태경    (인하대학교, 소재연구소, 무기재료공학과  );
  • 초록

    Thin films of Bi4-xSmxTi3O12(0 $\leq$ x $\leq$ 2) were prepared on Pt/Ti/SiO2/Si(100) at $700^{\circ}C$ using spin-coating with sols derived from Bi-Sm-Ti complex alkoxides. From X-ray diffraction analysis, it was observed that Sm-substituted phases resembled ferroelectric Bi4Ti3O12 in structure. Variations of their lattice parameters depending on the amount of Sm-substitution showed that an anomalous structural distortion might exist at x=1. The grain sizes of the thin films decreased from 0.115 ${\mu}{\textrm}{m}$ to 0.078 ${\mu}{\textrm}{m}$ with increasing the amount of Sm-substitution. The dielectric constants and the remanent polarizations of the thin films decreased with increasing the amount of the Sm-substitution, which were related to decrease of the stereo-active Bi3+ ion contributing to polarization. However, these values were exceptionally high at x=1, compared to those of the other substituted phases. Such an anomaly suggests that the phase of x=1 has 1:1 chemical ordering between Sm and Bi in structure. The thin films of all compositions except x=2 showed ferroelectricity. The thin film of x=2 was paraelectric, whose grains were too fine to exhibit ferroelectricity.


  • 주제어

    Thin film .   Spin-coating .   $Bi_4Ti_3O_{12}$ Sm-substitution .   Structure .   Ferroelectricity.  

  • 참고문헌 (18)

    1. Structural and electrical studies on rapid thermally processed ferroelectric$Bi_4Ti_3O_{12}$ then films by metallo-organic solution deposition , P C. Joshi;S. B. Krupanidhi , J. Appl. Phys. / v.72,pp.5827-5833,
    2. Thin-Layer Dielectrics in the $$[(Mg\frac{1}{2}Nb\frac{2}{3})_{1-x}Tix]O_3$$System , L. F. Francis;D. A. Payne , J. Am. Ceram. Soc. / v.74,pp.3000-3010,
    3. Polarization reversal and film structure in ferroelectric$Bi_4Ti_3O_{12}$Films deposited on silicon , S. Wu , J. Appl. Phys. / v.50,pp.4314-4318,
    4. Ferroelectricity in $Bi_4Ti_3O_{12}$and Its Solid Solutions , E. C. Subbarao , Physical Review / v.122,pp.804-807,
    5. Synthesis and Characterization of $Bi_4Ti_3O_{12}$ thin Films by Sol-Gel Processing , M. Toyoda;Y. Hamaji;K. Tomono;D. A. Payne , Jpn. J. Appl. Phys. / v.32,pp.4158-4162,
    6. Domian Structure and Polarization Reversal in Films of Ferroelectric Bismuth Titanate , S. Y. Wu;W. J. Takci;M. H. Francombc , Ferroelectrics / v.3,pp.217-224,
    7. Structure Retinement of Commesurately Modulated Bismuth Titanate, $Bi_4Ti_3O_{12}$ , A.D. Rae;J.G. Thomson;R.L. Withers;A.C. Willis , Acta Cryst. / v.B46,pp.474-487,
    8. Excimer laser-ablated bismuth titanate thin films , N. Maffci;S. B. Krupanidhi , Appl. Phys. Lett. / v.60,pp.781-783,
    9. Size Effects in Ferroelectric Thin Films , R. E. Newnham;K. ,R. Udayakumar;S. Trolier-Mckinstry;L. L. Hench(ed.);J. K. West(ed.) , Chemical Processing of Advanced Materials / v.,pp.379-393,
    10. The Formation and Characterization of Alkoxy-Derived $Bi_4Ti_3O_{12}$ , O. Yamaguchi;N. Maruyama;K. Hirota , Br. Ceram. Trans. J. / v.90,pp.111-113,
    11. Synthesis and Characterization of an acetate-alkoxide precursor for sol-gel derived $Bi_4Ti_3O_{12}$ , M. Toyoda;D. A. Payne , Mat. Lett. / v.18,pp.84-88,
    12. Crystal Symmetry, Optical Properties and Ferroelectric Polarization of $Bi_1Ti_3O_{12}$Single Crystals , S. E. Cummins;L. E. Cross , Appl. Phys. Lett. / v.10,pp.14-16,
    13. Epitaxial growth of ferroelectric bismuth titanate thin films by pulsed laser deposition , R. Ramesh;K. Luther;B. Wilkens;D. L. Hart;E. Wang;J. M. Tarascon;A. Inam;X. D. Wu;T. Venkatesan , Appl. Phys. Lett. / v.57,pp.1505-1507,
    14. Factors Affecting the Sol-Gel Processing of PZT Thin Layers , C D. E. Lakeman;J. Campion;D. A. Payne , Ceram. Trans. / v.25,pp.413-439,
    15. Synthesis and Characterization of $Bi_4Ti_3O_{12}$ , E Dayalan;C H. Peng;S.B. Desu , Ceram. Trans. / v.25,pp.279-291,
    16. Ferroelectric Field-effect Memory Device using $B_4Ti_3O_{12}$film , K. Sugibuchi;Y. Kurogi;N. Endo , J. Appl. Phys. / v.46,pp.2877-2881,
    17. Mixed bisimuth oxides with layer lattices , B. Aurivillius , Ark. Kemi / v.1,pp.499-512,
    18. Crystal Structure of $Bi_4Ti_3O_{12}$ , J. F. Drrian;R. E. Newnham;D. K. Smith;M. I. Kay , Ferroelectrics / v.3,pp.17-27,
  • 이 논문을 인용한 문헌 (1)

    1. 1998. "The Complexing Effect of $BaTiO_3\;for\;Bi_4Ti_3O_{12}$ on Layered Perovskite $Bi_4Ti_3O_{12}{\cdot}nBaTiO_3(n=1&2)$ Thin Films" 요업학회지 = Journal of the Korean Ceramic Society, 35(11): 1130~1140     

 활용도 분석

  • 상세보기

    amChart 영역
  • 원문보기

    amChart 영역

원문보기

무료다운로드
  • NDSL :
  • 한국세라믹학회 : 저널
유료다운로드

유료 다운로드의 경우 해당 사이트의 정책에 따라 신규 회원가입, 로그인, 유료 구매 등이 필요할 수 있습니다. 해당 사이트에서 발생하는 귀하의 모든 정보활동은 NDSL의 서비스 정책과 무관합니다.

원문복사신청을 하시면, 일부 해외 인쇄학술지의 경우 외국학술지지원센터(FRIC)에서
무료 원문복사 서비스를 제공합니다.

NDSL에서는 해당 원문을 복사서비스하고 있습니다. 위의 원문복사신청 또는 장바구니 담기를 통하여 원문복사서비스 이용이 가능합니다.

이 논문과 함께 출판된 논문 + 더보기