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Role of Am Piezoelectric Crystal Orientation in Solidly Mounted Film Bulk Acoustic Wave Resonators

Lee, Si-Hyung   (Thin Film Materials Research Center, KIST  ); Kang, Sang-Chul   (Thin Film Materials Research Center, KIST  ); Han, Sang-Chul   (Microsystem Research Center. KIST  ); Ju, Byung-Kwon   (Department of Ceramic Engineering, Yonsei UniversityUU0000936  ); Yoon, Ki-Hyun   (Thin Film Materials Research Center, KIST  ); Lee, Jeon-Kook   (Thin Film Materials Research Center, KIST  );
  • 초록

    To investigate the effect of AIN c-axis orientation on the resonance performance of film bulk acoustic wave resonators, solidly mounted resonators with crybtallographically different AIN piezoelectric films were prepared by changing only the bottom electrode surface conditions. As increasing the degree of c-axis texturing, the effective electromechanical coupling coefficient ( $\kappa$ $\_$ eff/) $^2$ in resonators increased gradually. The least 4 degree of full width at half maximum in an AIN(002) rocking curve, which corresponds to $\kappa$ $^2$ $\_$ eff/ of above 5%, was measured to be necessary for band pass filter applications in wireless communication system. The longitudinal acoustic wave velocity of AIN films varied with the degree of c-axis texturing. The velocity of highly c-axis textured AIN film was extracted to be about 10200 n/s by mathematical analysis using Matlab.


  • 주제어

    AIN .   Solidly mounted resonator .   Effective coupling coefficient .   Rocking curve .   Acoustic wave velocity.  

  • 참고문헌 (16)

    1. Measurements of the Bulk. C-axis Electromechanical Coupling Constant as a Function of AIN Film Quality , R.S.Naik;J.J.Lutsky;R.Reif;C.G.Sodini;A.Becker;L.Fetter;H.Huggins;R.Miller;J.Pastalan;G.Rittenhouse;Y.H.Wong , IEEE Trans. Ultrason. Ferroelectr. Freq. Control / v.47,pp.292-296,
    2. AIN-Si Thin Film Bulk Acoustic Over-moded Resonator , S.H.Lee;J.K.Lee;S.H.Kim;J.H.Kim;K.H.Yoon , J. Kor. Ceram. Soc / v.37,pp.1198-1203,
         
    3. G.S.Kino , Acoustic Waves: Devices, Imaging, and Analog signal processing / v.,pp.32,
    4. BAW Resonators Based on Aluminum Nitride Thin Films , M.A.Dubois;P.Muralt;V.Plessky , IEEE Proceeding on Ultrasonics Symposium / v.,pp.907-910,
    5. Measurement of the Effective Transverse Piezoelectric Coeffecient e of AIN and Pb(Zr Ti )O Thin Films , M.A.Dubois;P.Muralt , Sensors and Actuators / v.77,pp.106-112,
    6. Filter Banks Implemented with Integrated Thin Film Resonators , K.M.Lakin;K.T.McCarron;J.Belsick;R.Rose , IEEE Proceedings on Ultrasonics Symposium / v.,pp.851-854,
    7. Thin-film Resonators and Filters , K.M.Lakin , IEEE Proceedings on Ultrasonics Symposium / v.,pp.895-906,
    8. High-Q Microwave Acoustic Resonators and Filters , K.M.Lakin;G.R.Kline;K.T.McCarron , IEEE Trans. Microwave Theory and Tech. / v.41,pp.2139,
    9. ZnO Based Thin Film Bulk Acoustic Wave Filters for EGSM Band , J.Kaitila;M.Ylilammi;J.Molarius;J.Ella.T.Makkonen , IEEE Proceedings on Ultrasonics Symposium / v.,pp.803-806,
    10. Growth of Highly caxis Textured AIN Films on Mo Electrodes for Film Bulk Acoustic Wave Resonators , S.H.Lee;J.K.Lee;K.H.Yoon , J. Voc. Sci. Technol / v.A.21,pp.1-5,
    11. Growth and Applications of Group III-nitrides , O.Kmbacher , J. Phys.D / v.31,pp.2653,
    12. High Performance and Miniature Thin FIlm Bulk Acosutic Wave Filters for 5 GHz , T.Nishinara;T.Yokoyama;T.Miyashita;y.Satoh , IEEE Proceedings on Ultrasonics Symposium / v.,pp.,
    13. Influence of Electrode Configurations on the Quality Factor and Piezoelectric Coupling Constant of Solidly Mounted Bulk Acoustic Wave Resonators , S.H.Lee;K.H.Yoon;J.K.Lee , J. Appl. Phys. / v.92,pp.4062-4069,
    14. Development of Miniature Filters for Wireless Application , K.M.Lakin;G.R.Kline;K.T.McCarron , IEEE Trans. Microwave Theory Tech. / v.43,pp.2933-2939,
    15. Bulk Acoustic Wave Resonators and Filters for Applications Above 2 GHz , K.M.Lakin;J.R.Belsick;J.P.McDonald;K.T.McCarron;C.W.Andrus , IEEE MTT-S Int. Microwave Symp. Dig. / v.,pp.1487-1490,
    16. PZT Thin Film Bulk Acoustic Resonators and Filters , P.B.Kirby;Q.X.Su;E.Komur;Q.Zhang;M.Imura;R.Whatmore , IEEE Proceedings on International Frequency Contro Symposium and PDA Exhibition / v.,pp.687-694,

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    2. 1990 "생체계측을 위한 피하주입형 Si센서의 기술동향" 電子工學會誌 = The journal of Korea Institute of Electronics Engineers 17 (3): 1~9    
    3. 1990 "소형 Si 압력센서의 제작 및 특성 평가" 전자공학회논문지 = Journal of the Korean Institute of Telematics and Electronics 27 (11): 62~68    
    4. 1992 "마이크로 박막 센서의 기술동향" 전기학회지= The Processing of the Institute of Electrical Engineers 41 (2): 6~11    
    5. 1992 "(100) 실리콘의 깊은 이등망성 식각시 석각면의 가장자리에 존재하는 불균일성의 짤막한 고찰" 한국재료학회지 = Korean journal of materials research 2 (5): 383~386    
    6. 1993 "흐름측정용 실리콘 소자의 제작 및 특성 평가(l)" 한국재료학회지 = Korean journal of materials research 3 (1): 28~32    
    7. 1994 "실리콘 직접 접합 / 전기화학적 식각정지를 이용한 실리콘 다이아프램의 형성과 실리콘 압력센서 제조에의 응용" 센서학회지 = Journal of the Korean Sensors Society 3 (3): 45~53    
    8. 1994 "흐름측정용 실리콘 소자의 제작 및 특성 평가 (II)" 센서학회지 = Journal of the Korean Sensors Society 3 (1): 12~18    
    9. 1994 "실리콘 Thermopile을 이용한 감습 소자의 제작" 電子工學會論文誌. Jounnal of the Korea institute of telematics and electronics. A. A a31 (4): 70~76    
    10. 1995 "직접 접합된 실리콘 기판쌍에 있어서 계면 산화막의 상태와 이의 새로운 평가 방법" 電子工學會論文誌. Jounnal of the Korea institute of telematics and electronics. A. A a32 (3): 134~142    

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