본문 바로가기
HOME> 논문 > 논문 검색상세

논문 상세정보

PLD를 이용한 ZnO 박막의 구조적 특성과 표면의 형태에 관한 연구
The Structural Characteristic and Surface Morphology of ZnO Thin Films by Pulsed Laser Deposition

김재홍   (인하대학교 전기공학과UU0001092  ); 이경철   (인하대학교 전기공학과UU0001092  ); 이천   (인하대학교 전기공학과UU0001092  );
  • 초록

    ZnO thin films on (100) p-type silicon substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. The influence of the deposition parameters, such as oxygen pressure, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiments were performed for oxygen gas flow rate of 100~700 sccm and substrate temperatures in the range of 200~ $500^{\circ}C$ . We investigated the structural and morphological properties of ZnO thin films using X-ray diffraction(XRD), scanning electron microscopy(SEM) and atomic force microscopy(AFM).


  • 주제어

    ZnO .   Pulsed Laser Deposition(PLD) .   Nd:YAG laser .   (100) p-type silicon.  

  • 참고문헌 (24)

    1. 김영진,권오준, '고주파 마그네트론 스퍼터링법으로 제조한 ZnO박막의 기판에 따른 효과', 센서학회지, 제5권, 제6호, pp. 66-73, 1996 
    2. C. Kittel, 'Introduction to Solid State Physics', John Wiley and Sons, New York, 7th ed. p. 58, 1996 
    3. H.Z. Wu, KM. He, 'Low-temperature epitaxy of ZnO films on Si (001) and silica by reactive e-beam evaporation,' Journal of crystal growth, pp. 131-137, 2000 
    4. Young-Jin Kim, Hyeong-Joon Kim, 'Trapped oxygen in the grain boundaries of ZnO polycrystalline thin films prepared by plasma-enhanced chemical vapor deposition,' Materials letters, pp. 159-163, 1999 
    5. 강정석, '분위기 산소압 변화에 따른 ZnO 박막의 발광 특성 변화' 한국전기전자재료학회 (2001) 
    6. Zhai. Jiwei, Zhang Liangying, 'The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol gel process,' Ceramics international, pp. 883-885, 2000 
    7. T. Garcia, E. de Posada, 'Textured strontium ferrite thin films grown by PLD,' Materials letters, pp. 294-298, 2001 
    8. Y.R. Ryu, S. Zhu, 'ZnSe and ZnO film growth by pulsed laser deposition,' Applied surface science, pp. 127-129, 1998 
    9. S. H. Bae, S. Y. Lee, 'Pulsed laser deposition of ZnO thin films for application of light emission,' applied surface science, pp. 458-461, 2000 
    10. S. King, B.C. Khanra, 'Influence of Hydrogen Chemisorption on the Surface Composition of Pt-Rh/ A1203Catalysts,' Journal of Catalysis, pp. 277-283, 1996 
    11. B.S. Li, Y.C. Liu, 'The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition,' Journal of crystal growth, pp. 479-483, 2002 
    12. Zhuxi Fu, Bixia Lin, 'Photoluminescence and structure of ZnO films deposited on Si substrates by metal-organic chemical vapor deposition,' Thin solid f 0ms, pp. 302-306, 2002 
    13. A. Miyake, H. Kominami, 'Luminescent properties of ZnO thin films grown epitaxially on Si substrate,' Journal of crystal growth, pp. 294-298, 2000 
    14. V. Craciun, S. Amirhaghi, 'Effect of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition,' Applied Surface Science, pp. 99-106, 1995 
    15. K. Ogata, S.-W. Kim, 'ZnO growth on Si substrates by metalorganic vapor phase epitaxy,' Journal of crystal growth, pp. 112-116, 2002 
    16. Zhuxi Fu, Bixia Lin, 'The effect of Zn buffer layer on growth and luminescence of ZnO films deposited on Sisubstrates,' Journal of crystal growth, pp. 316-321, 1998 
    17. K. Ogata, T. Kawanishi, 'ZnO growth using homoepitaxial technique on sapphire and Si substrates by metalorganic vapor phase epitaxy,' Journal of crystal growth, pp. 237-239, 2002 
    18. Y.L. Liu, Y.C. Liu, 'Structural and optical properties of nanocrystalline ZnO films grown by cathodic electrodeposition on Si substrates,' Applied physics B, 2000 
    19. Maria Dinescu, P. Verardi, 'ZnO thin film deposition by laser ablation of Zn target in oxygen reactive atmosphere,' Applied surface science, pp. 149-153, 1996 
    20. Y.R. Ryu, S. Zhu, 'Synthesis of p-type ZnO films,' Journal of crystal growth, pp. 330-334, 2000 
    21. S. Muthukumar, C.R. Gorla, 'Control of morphology and orientation of ZnO thin films grown on $SiO_2/Si$ substrates,' Journal of crystal growth, pp. 197-201, 2001 
    22. 배상혁,이상렬, 'PLD로 증착한 ZnO박막의 발광 특성분석', 추계학술대회 논문집, 대한전기학회, 2000 
    23. A.B. Djurisic, Y. Chan, 'The optical dielectric function of ZnO,' Applied physics, 2002 
    24. Simon L. King, J.G.E. Gardeniers, 'Pulsed-laser deposited ZnO for device applications,' Applied surface science, pp. 811-818, 1996 

 저자의 다른 논문

  • 김재홍 (1)

    1. 2005 "사파이어 기판 위에 증착된 ZnO 박막의 기판온도와 산소 가스량에 따른 특성" 전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers 18 (7): 652~655    
  • Lee, Kyoung-Chel (5)

  • Lee, Cheon (17)

 활용도 분석

  • 상세보기

    amChart 영역
  • 원문보기

    amChart 영역

원문보기

무료다운로드
  • NDSL :
유료다운로드

유료 다운로드의 경우 해당 사이트의 정책에 따라 신규 회원가입, 로그인, 유료 구매 등이 필요할 수 있습니다. 해당 사이트에서 발생하는 귀하의 모든 정보활동은 NDSL의 서비스 정책과 무관합니다.

원문복사신청을 하시면, 일부 해외 인쇄학술지의 경우 외국학술지지원센터(FRIC)에서
무료 원문복사 서비스를 제공합니다.

NDSL에서는 해당 원문을 복사서비스하고 있습니다. 위의 원문복사신청 또는 장바구니 담기를 통하여 원문복사서비스 이용이 가능합니다.

이 논문과 함께 출판된 논문 + 더보기