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E-H Mode Transition Properties of Cylindrical ICP Hg:Kr

Yang Jong-Kyung    (Dept. of Electrical materials Engineering, Wonkwang University   ); Pack Kwang-Hyun    (Dept. of Electrical materials Engineering, Wonkwang University   ); Lee Jong-Chan    (Kumho Electric Inc   ); Park Dae-Hee    (Dept. of Electrical and Electronic Engineering, Wonkwang University  );
  • 초록

    In this paper, we designed a cylindrical type light source having an electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the transformer principle, an electrically equivalent circuit cylindrical type light source was analyzed. According to the parameters of electromagnetic induction, which were diameter of coil with cpO.3 $\~$ 1.2mm, number of turns with 4 $\~$ 12 turns, distance with 40 $\~$ l20mm and RF power with 10 $\~$ 150W, the electrical .md optical properties were measured. When the diameter of the coil was cp0.3mm, number of turns was 8 and distance was 40mm, and the maximum brightness of 29,730 cd/m $^{2}$ was shown with RF power l50W. The relationship between electromagnetic induction and plasma discharges was demonstrated using the mode transition from E-mode to H-mode


  • 주제어

    E-H mode transition .   ICP .   Inductively coupled plasma.  

  • 참고문헌 (6)

    1. I.M. EI-Fayoumi and I.R. Jones: 'The electromagnetic basis of the transformer model for an inductively coupled RF plasma source', Plasma sources Sci. Technol 7, 179-185 (1998) 
    2. T Czerwiec and D B Graves: 'Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy', J. Phys. D: Appl. Phys. 37 pp. 2827-2840 (2004) 
    3. W Bolton, 'Electrical and magnetic properties of materials', 82-84 (1992) 
    4. Annemie Bogaerts, Eric Neyts, Renaat Gilbels, Joost van der Mullen: 'Gas Discharge and their applications', Atomic Spectroscopy, Vol. 57, pp. 638-641 (2002) 
    5. D.O. Wharmby: 'Electrodeless lamps for lighting', IEE Proceedings A, Vol. 140 Issue: 6, Nov., pp. 465- 468 (1993) 
    6. S.Xu, K.N Ostrikiv: 'Hysteresis and mode transition in a low-frequency inductively coupled plasma', J.Vac. Sc.Technology A, Vol. 18 (15), pp. 2185-2187 (2000) 

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  • 양종경 (3)

    1. 2005 "LIF를 이용한 Hg-Ar(1Torr)의 플라즈마 밀도 측정" 전기학회논문지. The transactions of the Korean Institute of Electrical Engineers. C/ C, 전기물성·응용부문 54 (5): 213~217    
    2. 2005 "원통형 ICP 광원 모드변환의 안테나 의존성" 전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers 18 (8): 772~778    
    3. 2006 "무전극 형광램프용 페라이트에 따른 전기적 및 광학적 특성" 전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers 19 (2): 200~206    

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