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A Study on the Design and Characteristics of thin-film L-C Band Pass Filter

Kim In-Sung    (Electric & Magnetic Devices Research Group. Korea Electrotechnology Research Institute   ); Song Jae-Sung    (Electric &Magnetic Devices Research Group. korea Electrotechnology research Institute   ); Min Bok-Ki    (Electric & Magnetic Devices Research Group. Korea Electrotechnology Research Institute   ); Lee Won-Jae    (Electric & Magnetic Devices Research Group. Korea Electrotechnology Research Institute   ); Muller Alexandru    (Laboratory of Microsystem and Micromachined Microwave Components, IMT, Romania  );
  • 초록

    The increasing demand for high density packaging technologies and the evolution to mixed digital and analogue devices has been the con-set of increasing research in thin film multi-layer technologies such as the passive components integration technology. In this paper, Cu and TaO thin film with RF sputtering was deposited for spiral inductor and MOM capacitor on the $SiO_2$ /Si(100) substrate. MOM capacitor and spiral inductor were fabricated for L-C band pass filter by sputtering and lift-off. We are analyzed and designed thin films L-C passive components for band pass filter at 900 MHz and 1.8 GHz, important devices for mobile communication system. Based on the high-Q values of passive components, MOM capacitor and spiral inductors for L-C band pass filter, a low insertion loss of L-C passive components can be realized with a minimized chip area. The insertion loss was 3 dB for a 1.8 GHz filter, and 5 dB for a 900 MHz filter. This paper also discusses a analysis and practical design to thin-film L-C band pass filter.


  • 주제어

    Integrated passive component .   thin-film L-C band pass filter .   high-Q .   MOM capacitor .   spiral inductor.  

  • 참고문헌 (8)

    1. Sonnet user's manual, 2003 
    2. B. K. Min, I. S. Kim, J. S. Song, 'A Study on the Design and Characteristics of L-C thin films Filter at Microwave Band', in SPIE symp., 2004 
    3. Y. C. Shih et al., 'A broad band parameters extraction technique for the equivalent circuit of planar inductrors', IEEE MTT-S Digest, pp1345-1348, 1992 
    4. S Chaki et al., 'Experimental study on spiral inductor', IEEE MTT-S digest, pp. 753-756, 1995 
    5. S. A. Maas, Microwave Mixer Norwood, MA:Artech House, 1993 
    6. I. S. Kim, J. S. Song, M. S. Yun and J. H. Park, 'The Study on Dielectric Property and Thermal Stability of $Ta_2O_5$ Thin-films for RF Passive Devices', KIEE Transaction Vol. 51 C, No. 5, pp 185-190 (2002) 
    7. J. Helszajin. 'Microwave planar passive circuit and filters', John Wiley & Sons Lted., 1994 
    8. H. Do Ky, S. Meszaros, M. Cuhaci, B. Syrett, 'Physical Lumped Modeling of thin film MIM capacitor' 

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