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ETRI journal v.27 no.4, 2005년, pp.405 - 410  

Indium Tin Oxide Thin Films Grown on Polyethersulphone (PES) Substrates by Pulsed-Laser Deposition for Use in Organic Light-Emitting Diodes

Kim, Kyung-Hyun    (Future Technology Research Division, ETRI   ); Park, Nae-Man    (Future Technology Research Division, ETRI   ); Kim, Tae-Youb    (Future Technology Research Division, ETRI   ); Cho, Kwan-Sik    (Future Technology Research Division, ETRI   ); Sung, Gun-Yong    (Future Technology Research Division, ETRI   ); Lee, Jeong-Ik    (Basic Research Laboratory, ETRI   ); Chu, Hye-Yong    (Basic Research Laboratory, ETRI  );
  • 초록

    High quality indium tin oxide (ITO) thin films were grown by pulse laser deposition (PLD) on flexible polyethersulphone (PES) substrates. The electrical, optical, and surface morphological properties of these films were examined as a function of substrate temperature and oxygen pressure. ITO thin films, deposited by PLD on a PES substrate at room temperature and an oxygen pressure of 15 mTorr, have a low electrical resistivity of $2.9{\times}10^{-4}{\Omega}cm$ and a high optical transmittance of 84 % in the visible range. They were used as the anode in organic light-emitting diodes (OLEDs). The maximum electro luminescence (EL) and current density at 100 $cd/m^2$ were 2500 $cd/m^{2}$ and 2 $mA/m^{2}$ , respectively, and the external quantum efficiency of the OLEDs was found to be 2.0 %.


  • 주제어

    Indium tin oxide (ITO) .   plastic substrate .   pulse laser deposition (PLD) .   organic light-emitting diodes (OLED).  

  • 참고문헌 (17)

    1. The Effect of Pulsed Magnetron Sputtering on the Properties of Indium Tin Oxide Thin Films , Hwang, M.S.;Lee, H.J.;Jeong, H.S.;Seo, Y.W.;Kwon, S.J. , Surf. and Coat. Tech. / v.171,pp.29-33,
    2. Preparation and Properties of Indium Tin Oxide Films Deposited on Polyester Substrates by Reactive Evaporation , Ma, J.;Li, S.Y.;Zhao, J.Q.;Ma, H.L. , Thin Solid Films / v.307,pp.200-202,
    3. Fabrication of Highly Efficient Organic Electroluminescent Devices , Kido, J.;Iizumi, Y. , Appl. Phys. Lett. / v.73,pp.2721-2723,
    4. Dye-Doped Molecular Light-Emitting Diodes with Enhanced Performance , Murata, H.;Merritt, C.D.;Mattoussi, H.;Kafafi, Z.H. , Proc. SPIE / v.3476,pp.88-95,
    5. Deposition of Indium?Tin-Oxide Films on Polymer Substrates for Application in Plastic-based Flat Panel Displays , Park, S.K.;Han, J.I.;Kim, W.K.;Kwak, M.G. , Thin Solid Films / v.397,pp.49-55,
    6. Indium Tin Oxide Thin Films Grown on Flexible Plastic Substrates by Pulsed-Laser Deposition for Organic Light-Emitting Diodes , Kim, H.;Hortwitz, J.S.;Kushto, G.P.;Kafafi, Z.H.;Chrisey, D.B. , Appl. Phys. Lett. / v.79,pp.284,
    7. Band Gap Engineering of SiCN Film Grown by Pulsed Laser Deposition , Park, N.M.;Kim, S.H.;Sung, G.Y. , J. Appl. Phys. / v.94,pp.2725-2728,
    8. Amorphous Silicon Carbon Nitride Films Grown by the Pulsed Laser Deposition of a SiC-SiN Mixed Target , Park, Nae-Man;Kim, Sang-Hyeob;Sung, Gun-Yong , ETRI J. / v.26,pp.257-261,
    9. High-Performance Organic Light-Emitting Diodes Using ITO Anodes Grown on Plastic by Room-Temperature Ion-Assisted Deposition , Yang, Y.;Huang, Q.;Metz, A.W.;Ni, J.;Jin, S.;Marks, T.J.;Madsen, M.E.;Divenere, A.;Ho, S.T. , Adv. Mater. / v.16,pp.321-324,
    10. Electrical and Optical Properties of $In_2O_3$: Sn Films Prepared by Activated Reactive Evaporation , Nath, P.;Bunshah, R.F.;Basol, B.H.;Staffsud, O.M. , Thin Solid Films / v.72,pp.463-468,
    11. Reaction Kinetics of the Formation of Indium Tin Oxide Films Grown by Spray Pyrolysis , Vasu, V.;Subrahmanyam, A. , Thin Solid Films / v.193-194,pp.696-703,
    12. Flexible Organic Electroluminescent Devices Based on Fluorine-Containing Colorless Polyimide Substrates , Lim, H.;Cho, W.J.;Ha, C.S.;Ando, S.;Kim, Y.K.;Park, C.H.;Lee, K. , Adv. Mater. / v.14,pp.1275-1279,
    13. Evaporated Sn-doped $In_2O_3$ Films: Basic Optical Properties and Applications to Energy-Efficient Windows , Hamberg, I.;Granqvist, C.G. , J. Appl. Phys. / v.60,pp.R123-R160,
    14. Indium Tin Oxide Films Prepared by Radio Frequency Magnetron Sputtering Method at a Low Processing Temperature , Zhang, K.;Zhu, F.;Huan, C.;Wee, A. , Thin Solid Films / v.376,pp.255-263,
    15. Thin-Film-Transistor- and Diode-Addressed AMLCDs on Polymer Substrates , Young, N.D.;Bunn, R.M.; Wilks, R.W.;McCulloch, D.J.;Deane, S.C.;Edwards, M.J.;Harkin, G.;Pearson, A.D. , J. Soc. Inf. Disp. / v.5/3,pp.275-281,
    16. Electrical Properties of Crystalline ITO Films Prepared at Room Temperature by Pulsed Laser Deposition on Plastic Substrates , Izumi, H.;Ishihara, T.;Yoshida, H.;Motoyama, M. , Thin Solid Films / v.411,pp.32-35,
    17. Preparation of Conducting and Transparent Thin Films of Tin-doped Indium Oxide by Magnetron Sputtering , Buchanan, M.;Webb, J.B.; Williams, D.F. , Appl. Phys. Lett. / v.37,pp.213-215,

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