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Measurement of Sub-micrometer Features Based on The Topographic Contrast Using Reflection Confocal Microscopy

Lee SeungWoo    (Dept. of Mechanical Eng, KAIST   ); Kang DongKyun    (Dept. of Mechanical Eng, KAIST   ); Yoo HongKi    (Dept. of Mechanical Eng, KAIST   ); Kim TaeJoong    (Dept. of Mechanical Eng, KAIST   ); Gweon Dae-Gab    (Dept. of Mechanical Eng, KAIST   ); Lee Suk-Won    (Micro Nano System Technology R/D LAB, Samsung Electronics Co. Ltd,   ); Kim Kwang-Soo    (Micro Nano System Technology R/D LAB, Samsung Electronics Co. Ltd,  );
  • 초록

    We describe the design and the implementation of video-rate reflection confocal scanning microscopy (CSM) using an acousto-optical deflector (AOD) for the fast horizontal scan and a galvanometer mirror (GM) for the slow vertical scan. Design parameters of the optical system are determined for optimal resolution and contrast. The OSLO simulations show that the performances of CSM are not changed with deflection angle and the wavefront errors of the system are less than 0.012λ. To evaluate the performances of designed CSM, we do a series of tests, measuring lateral and axial resolution, real time image acquisition. Due to a higher axial resolution compared with conventional microscopy, CSM can detect the surface of sub-micrometer features. We detect 138㎚ line shape pattern with a video-rate (30 frm/sec). And 10㎚ axial resolution is archived. The lateral resolution of the topographic images will be further enhanced by differential confocal microscopy (DCM) method and computational algorithms.


  • 참고문헌 (7)

    1. A. Draijer, and P. M. Houpt, 'A standard video-rate confocal laserscanning reflected and fluorescence microscope,' Scanning, 10, pp. 139-145, 1988 
    2. S. W. Lee and Dong-Kyun Kang, 'Design and Performance Evaluation of Reflection Confocal Microscopy using Acousto-Optical Deflector and Slit detector,' in Proceedings of SPIE, pp. 235-241, 2004 
    3. R. E. Fishcer and B. Tadic-Galeb, Optical System Design, McGraw-Hill, 2000 
    4. Roger Y. Tsien and Brian J. Bacskai, Video-Rate confocal Microscopy in Handbook of Biological Confocal Microscopy, Plenum, New York, pp. 459-478, 1995. 
    5. C. H. Lee and J. Wang, 'Noninterferometric differential confocal microscopy with 2-nm depth resolution.' Opt. Commun., 135, 4/6, pp. 233-237, 1997 
    6. C. H. Lee and H. Y. Hhiang, H. Y. Mong, 'Sub- diffraction- limit imaging based on the topographic contrast of differential confocal mi-crosopy,' Opt. Lett., 28, 19, October, pp. 1772-1774, 2003 
    7. C. J. R. Sheppard and D. M. Shotton, Confocal Laser Scanning Microscopy, Springer-Verlag New York Inc. 1997 

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