본문 바로가기
HOME> 논문 > 논문 검색상세

논문 상세정보

Effects of Codoping with Fluorine on the Properties of ZnO Thin Films

Heo, Young-Woo   (Department of Inorganic Materials Engineering, Kyungpook National UniversityUU0000096  ); Norton, D.P.   (Department of Materials Science and Engineering, University of FloridaUU0017313  );
  • 초록

    We report on the effects of co-doping with fluorine on properties of ZnO thin films grown by pulsed-laser deposition. The transport characteristics of Ag-F and Li-F codoped ZnO films were determined by Hall-effect measurements at room temperature. Ag-F codoped ZnO films showed n-type semiconducting behaviors. An ambiguous carrier type was observed in Li-F codoped ZnO films grown at a temperature of 500 $^{\circ}C$ with the oxygen pressures of 20 and 200 mTorr. The qualities of the codoped ZnO films were studied by X-ray diffraction, atomic force microscopy, X-ray photoemission spectroscopy, and photoluminescence.


  • 주제어

    ZnO .   p-type .   Codoping.  

  • 참고문헌 (27)

    1. H. Nishiyama, N. Saito, H. Chou, K. Sato, and Y. Inoue, 'Effects of Surface Acoustic Waves on Adsorptive Proper- ties of ZnO and NiO Thin Films. Deposited on Ferroelectric Substrates,' Surf. Sci., 433-435 525-28 (1999) 
    2. Y. P. Wang, W. I. Lee, and T. Y. Tseng, 'Degradation Phenomena of Multilayer ZnO--Glass Varistors Studied by Deep Level Transient Spectroscopy,' Appl. Phys. Lett., 69 1807 (1996) 
    3. W. P. Kang and C. K. Kim, 'Catalyst-Adsorptive Oxidesemiconductor Gas Sensors,' Sensors and Actuators B, 13-14 682 (1993) 
    4. F. Paraguay D. M. Miki-Yoshida, J. Morales, J. Solis, and W. L. Estrada, 'Influence of Al, In, Cu, Fe, and Sn Dopants on the Response of Thin Film ZnO Gas Sensor to Ethanol Vapor,' Thin Solid Films, 373 137 (2000) 
    5. C. R. Wuethrich, C. A. P. Muller, G. R. Fox, and H. G. Limberger, 'All Fiber Acousto-Optic Modulator Using ZnO Piezoelectric Actuators,' Sensors and Actuators A, 66 114 (1998) 
    6. S. Major, S. Kumar, M. Bhatnagar, and K. L. Chopra, 'Effect of Hydrogen Plasma Treatment on Transparent Conducting Oxides,' Appl. Phys. Lett., 49 394 (1986) 
    7. S. Masuda, K. Kitamura, Y. Okumura, S. Miyatake, H. Tabata, and T. Kawai, 'Transparent Thin Film Transistors using ZnO as an Active Channel Layer and their Electrical Properties,' J. Appl. Phys., 93 1624 (2003) 
    8. P. F. Carcia, R. S. McLean, M. H. Reilly, and G. Nunes Jr., 'Transparent ZnO Thin-Film Transistor Fabricated by RF Magnetron Sputtering,' Appl. Phys. Lett., 82 1117 (2003) 
    9. J. H. Chang, M. W. Cho, H. M. Wang, H. Wenisch, T. Hanada, T. Yao, K. Sato, and O. Oda, 'Structural and Optical Properties of High-Quality ZnTe Homoepitaxial Layers,' Appl. Phys. Lett., 77 1256 (2000) 
    10. S. B. Zhang, S. H. Wei, and A. Zunger, 'Intrinsic n-Type Versus p-Type Doping Asymmetry and the Defect Physics of ZnO,' Phys. Rev. B, 63 075205 (2001) 
    11. C. H. Park, S. B. Zhang, and S. H. Wei, 'Origin of p-Type Doping Difficulty in ZnO: The Impurity Perspective,' Phys. Rev. B, 66 073202 (2002) 
    12. D. J. Dai, 'Predictor of p-Type Doping in II-VI Semiconductors,' Phys. Rev. B, 59 15181 (1999) 
    13. T. Aoki, D. C. Look, and Y. Hatanaka, 'ZnO Diode Fabricated by Excimer-Laser Doping,' Appl. Phys. Lett., 76 3257 (2000) 
    14. K. K. Kim, H. S. Kim, D. K. Hwang, J. H. Lim, and S. J. Park, 'Realization of p-Type ZnO Thin Films via Phosphorus Doping and Thermal Activation of the Dopant,' Appl. Phys. Lett., 83 63 (2003) 
    15. Y. W. Heo, Y. W. Kwon, Y. J. Li, J. Pearton, and D. P. Norton, 'p-Type Behavior in Phosphorus-Doped (Zn,Mg)O Device Structures,' Appl. Phys. Lett., 84 3474 (2004) 
    16. D. C. Look, D. C. Reynolds, C. W. Litton, R. L. Jones, D. B. Eason, and G. Cantwell, 'Characterization of Homoepitaxial p-Type ZnO Grown by Molecular Beam Epitaxy,' Appl. Phys. Lett., 81 1830 (2002) 
    17. C.-C. Lin, S.-Y. Chen, S.-Y. Cheng, and H.-Y. Lee, 'Properties of Nitrogen-Implanted p-Type ZnO Films Grown on $Si_3N_4/Si$ by Radio-Frequency Magnetron Sputtering,' Appl. Phys. Lett., 84 5040 (2004) 
    18. S. Limpijumnong, S. B. Zhang, S.-H. Wei, and C. H. Park, 'Doping by Largesize-Mismatched Impurities: The Microscopic Origin of Arsenic-or Antimony-Doped p-Type Zinc Oxide,' Phys. Rev. Lett., 92 155504 (2004) 
    19. Y. R. Ryu, T. S. Lee, J. H. Leem, and H. W. White, 'Fabrication of Homostructural ZnO p--n Junctions and Ohmic Contacts to Arsenic-Doped p-Type ZnO,' Appl. Phys. Lett., 83 4032 (2003) 
    20. T. Ohshima, T. Ikegami, K. Ebihara, J. Asmussen, and R. K. Thareja, 'Synthesis of p-Type ZnO Thin Films Using Co-Doping Techniques Based on KrF Excimer Laser Deposition,' Thin Solid Films, 435 49 (2003) 
    21. X. Li, Y. Yan, T. Gessert, C. DeHart, C. L. Perkins, D. Young, and T. J. Coutts, 'p-Type ZnO Thin Films Formed by CVD Reaction of Diethylzinc and NO Gas,' Electrochem. Solid-State Lett., 6 C56 (2003) 
    22. K.-H. Bang, D.-K. Hwang, M.-C. Park, Y.-D. Ko, I. Yun, and J.-M. Myoung, 'Formation of p-Type ZnO Film on InP Substrate by Phosphor Doping,' Appl. Surf. Sci., 210 177 (2003) 
    23. A. Zunger, 'Practical Doping Principles,' Appl. Phys. Lett., 83 57 (2003) 
    24. F. Zhuge, L. P. Zhu, Z. Z. Ye, D. W. Ma, J. G. Lu, J. Y. Huang, F. Z. Wang, Z. G. Ji, and S. B. Zhang, 'ZnO p-n Homojunctions and Ohmic Contacts to Al-N Co-Doped p- Type ZnO,' Appl. Phys. Lett., 87 092103 (2005) 
    25. T. Yamamoto and H. Katayama-Yoshida, 'Physics and Control of Valence States in ZnO by Codoping Method,' Physica B, 302-303 155 (2001) 
    26. C. M. Frans and Pol, Van De, 'Thin-Film ZnO-Properties and Applications,' Ceram. Bull., 69 1959 (1990) 
    27. D. C. Look and B. Claflin, 'P-Type Doping and Devices Based on ZnO,' Phys. Status Solid A, 241 624 (2004) 

 저자의 다른 논문

  • 허영우 (6)

    1. 1996 "$BaB_2B_4$ 첨가에 따른 반도성 $BaTiO_3$ 세라믹스의 소결 및 전기적 특성" 요업학회지 = Journal of the Korean Ceramic Society 33 (9): 1038~1044    
    2. 2009 "PLD법에 의한 Mg가 첨가된 CuCrO2 박막 성장" 한국표면공학회지 = Journal of the Korean institute of surface engineering 42 (2): 68~72    
    3. 2016 "Effect of Surface Treatment on the Formation of NiO Nanomaterials by Thermal Oxidation" Applied science and convergence technology 25 (6): 149~153    
    4. 2017 "저융점 합금(Bi58Sn42)을 이용한 Metal Mesh Touch Sensor용 Ag 페이스트의 전기적 특성" 한국표면공학회지 = Journal of the Korean institute of surface engineering 50 (6): 510~515    
    5. 2018 "P-type Electrical Characteristics of the Amorphous La2NiO4+δ Thin Films" 한국표면공학회지 = Journal of the Korean institute of surface engineering 51 (4): 231~236    
    6. 2018 "Effects of Co-doping on Densification of Gd-doped CeO2 Ceramics and Adhesion Characteristics on a Yttrium Stabilized Zirconia Substrate" 한국세라믹학회지 = Journal of the Korean Ceramic Society 55 (6): 576~580    

 활용도 분석

  • 상세보기

    amChart 영역
  • 원문보기

    amChart 영역

원문보기

무료다운로드
유료다운로드

유료 다운로드의 경우 해당 사이트의 정책에 따라 신규 회원가입, 로그인, 유료 구매 등이 필요할 수 있습니다. 해당 사이트에서 발생하는 귀하의 모든 정보활동은 NDSL의 서비스 정책과 무관합니다.

원문복사신청을 하시면, 일부 해외 인쇄학술지의 경우 외국학술지지원센터(FRIC)에서
무료 원문복사 서비스를 제공합니다.

NDSL에서는 해당 원문을 복사서비스하고 있습니다. 위의 원문복사신청 또는 장바구니 담기를 통하여 원문복사서비스 이용이 가능합니다.

이 논문과 함께 이용한 콘텐츠
이 논문과 함께 출판된 논문 + 더보기