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A Study on Lateral Distribution of Implanted Ions in Silicon

Jung, Won-Chae   (Department of Electronic Engineering, Kyonggi UniversityUU0000066  ); Kim, Hyung-Min   (Department of mechanical System Design Engineering, Kyonggi UniversityUU0000066  );
  • 초록

    Due to the limitations of the channel length, the lateral spread for two-dimensional impurity distributions is critical for the analysis of devices including the integrated complementary metal oxide semiconductor (CMOS) circuits and high frequency semiconductor devices. The developed codes were then compared with the two-dimensional implanted profiles measured by transmission electron microscope (TEM) as well as simulated by a commercial TSUPREM4 for verification purposes. The measured two-dimensional TEM data obtained by chemical etching-method was consistent with the results of the developed analytical model, and it seemed to be more accurate than the results attained by a commercial TSUPREM4. The developed codes can be applied on a wider energy range $(1KeV{\sim}30MeV)$ than a commercial TSUPREM4 of which the maximum energy range cannot exceed 1MeV for the limited doping elements. Moreover, it is not only limited to diffusion process but also can be applied to implantation due to the sloped and nano scale structure of the mask.


  • 주제어

    Implantation .   Chemical etching .   Computer simulation and developed model .   TEM.  

  • 참고문헌 (23)

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