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Journal of semiconductor technology and science v.7 no.3, 2007년, pp.161 - 165   피인용횟수: 1

Characterization of Nanopores on Micropillars Pt Electrodes for Non-Enzymatic Electrochemical Sensor Applications

Park, Dae-Joon   (Department of Electronic Engineering, Kwangwoon UniversityUU0000194  ); Lee, Yi-Jae   (Department of Electronic Engineering, Kwangwoon UniversityUU0000194  ); Park, Jae-Yeong   (Department of Electronic Engineering, Kwangwoon UniversityUU0000194  );
  • 초록

    In this paper, mesoporous Pt on micro pillars Pt electrode is newly designed, fabricated, and characterized on silicon substrate for non-enzymatic electrochemical sensor micro-chip integrated with CMOS readout circuitry. The fabricated micro/nano Pt electrode has cylindrical hexangular arrayed nano Pt pores with a diameter of 3.2 nm which is formed on top of the micro pillars Pt electrode with approximately $6{\mu}m$ in diameter, $6{\mu}m$ in space, and $50{\mu}m$ in height. The measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately $9.9nA/mm^2,\;6.72{\mu}A/mm^2,\;and\;7.67{\mu}A/mm^2$ in 10mM glucose solution with 0.1M phosphate buffered saline (PBS) solution, respectively. In addition, the measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately $0.15{\mu}A/mm^2,\;0.56{\mu}A/mm^2,\;and\;0.74{\mu}A/mm^2$ in 0.1mM ascorbic acid (AA) solution with 0.1M phosphate buffered saline (PBS) solution, respectively. This experimental results show that the proposed micro/nano Pt electrode is highly sensitive and promising for CMOS integrated non-enzymatic electrochemical sensor applications. Since the micro-pillar Pt electrode can also be utilized with a micro-fluidic mixer in the sensor chip, the sensor chip can be much smaller, cheaper, and easier to be fabricated.


  • 주제어

    Mesoporous Pt .   Micropillar Pt .   Electrochemical sensor .   CMOS integrated .   Nonenzymatic .   Biosensors .   Glucose sensors.  

  • 참고문헌 (7)

    1. S. J. Park, T. D. Chung and H. C. Kim, 'Nonenzymatic glucose detection using mesoporous platinum,' Anal. Chem. United States, vol. 75, pp. 3046-3049, July 2003 
    2. S. Park, H. Boo and T. D. Chung, 'Elecrochemical non-enzymatic glucose sensors,' Anal. Chim. Acta., vol. 556, pp. 46-57, 2006 
    3. H. Boo, S. Park, B. Ku, Y. Kim, J. H. Park, H. C. Kim and T. D. Chung, 'Ionic strength-controlled virtual area of mesoporous platinum electrode,' J. Am. Chem. Soc. United States, vol. 126, pp. 4524-4525, March 2004 
    4. Daniel C. Harris, 'Quantitative Chemical Analysis,' W. H. Freeman and Company. New York, Sixth edition, 2003 
    5. G. S. Attard, P. N. Bartlett, N. R. B. Coleman, J. M. Elliott, J. R. Owen and J. H. Wang, 'Mesoporous platinum films from lyotropic liquid crystalline phases,' Science. United States, vol. 278, pp. 838-840, October 1997 
    6. H. K. Seo and J. Y. Park, 'Nano-Fabricated Mesoporous Pt electrode on Silicon for CMOS Integrated Electrochemical Sensor Applications', IEEE NEMS 2006 
    7. Wen-Tso Liu and Liang Zhu, 'Environmental microbiology-on-a-chip and its future impacts,' TRENDS in Biotechnology, vol. 23 (4), pp. 174-179, April 2005 
  • 이 논문을 인용한 문헌 (1)

    1. 2014. "" Bulletin of the Korean Chemical Society, 35(7): 2019~2024     

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