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Parametric study of injection molding and hot embossing in polymer microfabrication

Wu, Cheng-Hsien    (Department of Mold and Die Engineering, National Kaohsiung University of Applied Sciences   ); Kuo, Hsien-Chang    (Department of Mechanical Engineering, National Central University  );
  • 초록

    In recent years, plastics have begun to show great commercial potential especially in manufacturing micro-structured parts. Injection molding and hot embossing are two major microfabrication methods. Replication accuracy was investigated for these two methods. Polymethyl methacrylate (PMMA) was used as the polymer substrate. The mold insert (or master) was fabricated by LIGA-type method. In this study, hot embossing was found to have better replication accuracy for microstructure than injection molding. Experiments were also conducted to study the effects of process parameters on the replication quality.


  • 주제어

    Injection molding .   Hot embossing .   Microfabrication .   MEMS.  

  • 참고문헌 (8)

    1. H. Becker and U. Heim, Hot embossing as a method for the fabrication of polymer high aspect ratio structures, Sensors and Actuators. 83 (2000) 130-135 
    2. D. Yao and B.J. Kim, Simulation of the filling process in micro channels for polymeric materials, Micromech. Microeng. 12 (2002) 604-610 
    3. R.J. Wimberger-Friedl, Injection Molding of Submum Grating Optical Elements, Injection Molding Technol. 4 (2000) 78-83 
    4. R.W. Jaszewski, H. Schift, J. Gobrecht and P. Smith, Hot embossing in polymers as a direct way to pattern resist, Microelectronic Engineering. 41/42 (1998) 575-578 
    5. M.T. Gale, C. Gimkiewicz, S. Obi, M. Schnieper, J. Sochtig, H. Thiele, S. Westenhofer, Replication technology for optical microsystems, Optics and Lasers in Engineering. 43 (2005) 373-386 
    6. X.-J. Shen, Li-Wei Pan and Liwei Lin, Microplastic embossing process: experimental and theoretical characterizations, Sensors and Actuators A. 97-98 (2002) 428-433 
    7. C.-R. Lin, R.-H. Chen, C. Hung, Preventing nonuniform shrinkage in open-die hot embossing of PMMA microstructures, Journal of Materials Processing Technology. 140 (2003) 173-178 
    8. Yi-Je Juang, L.J. Lee and K.W. Koelling, Hot Embossing in Microfabrication. Part I: Experimental, Polymer Engineering and Science. 42 (2002) 539-550 

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