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Journal of mechanical science and technology v.22 no.3, 2008년, pp.514 - 521   피인용횟수: 4

Mass production of 3-D microstructures using projection microstereolithography

Ha, Young-Myoung    (Research Institute of Mechanical Technology, Pusan National University   ); Choi, Jae-Won    (W.M. Keck Center for 3D Innovation, The University of Texas at El Paso   ); Lee, Seok-Hee    (School of Mechanical Engineering, Pusan National University  );
  • 초록

    Microstereolithography(MSL) technology is derived from the conventional stereolithography process and can meet the demands for fabricating complex 3-D microstructures with high resolution. This technology can be divided into scanning and projection methods, which have different levels of precision and fabrication speeds. Scanning MSL fabricates very fine 3-D microstructures by controlling the position of the laser spot on the resin surface. Projection MSL quickly fabricates one layer with one exposure using a mask. In this paper, we propose a projection MSL system with uniform illumination and image formation based on optical design for fabricating microstructure arrays. This system can realize mass production of 3-D microstructures in the meso-range, which falls between micro- and macro-ranges, with a resolution of a few microns. Microstructure arrays were fabricated to verify the performance of the proposed system.


  • 주제어

    Microstereolithography .   Microstructure arrays .   Mass production.  

  • 참고문헌 (15)

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    4. K. Ikuta and K. Kirowatari, Real three dimensional micro fabrication using stereo lithography and metal molding, Proc. of the IEEE MEMS'93, Fort Lauderdale, New York, USA. (1993) 42-47 
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    12. I. H. Lee and D. W. Cho, An investigation on photopolymer solidification considering laser irradiation energy in micro-stereolithography, Microsyst. Technol. 10 (8) (2004) 592-598 
    13. V. K. Varadan, X. Jiang and V. V. Varadan, Microstereolithography and other Fabrication Techniques for 3D MEMS, John Wiley & Sons, West Sussex, England, (2001) 
    14. A. Bertsch, S. Zissi, J. Y. Jezequel, S. Corbel and J. C. Andre, Microstereophotolithography using a liquid crystal display as dynamic mask-generator, Microsyst. Technol. 3 (2) (1997) 42-47 
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  • 이 논문을 인용한 문헌 (4)

    1. 2009. "" International journal of precision engineering and manufacturing, 10(1): 91~98     
    2. Park, In-Baek ; Ha, Young-Myung ; Kim, Min-Sub ; Lee, Seok-Hee 2009. "Development of Dithering Process for Accuracy of Microstructure by Projection Microstereolithgraphy based on UV-DMD" 한국정밀공학회지 = Journal of the Korean Society of Precision Engineering, 26(8): 7~13     
    3. 2010. "" International journal of precision engineering and manufacturing, 11(2): 335~340     
    4. 2010. "" International journal of precision engineering and manufacturing, 11(3): 483~490     

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