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한국현미경학회지 = Korean journal of microscopy v.39 no.3, 2009년, pp.277 - 281   피인용횟수: 1

Alumina dummy 충전재를 이용한 GaN 기반 박막재료의 단면 TEM 시편준비
Cross-sectional TEM Specimen Preparation of GaN-based Thinfilm Materials Using Alumina Dummy Filler

오상호    (Department of Materials Science and Engineering, Pohang University of Science and Technology   ); 최주형    (Korea Basic Science Institute (KBSI)   ); 송경    (Korea Basic Science Institute (KBSI)   ); 정종만    (Korea Basic Science Institute (KBSI)   ); 김진규    (Korea Basic Science Institute (KBSI)   ); 유인근    (National Fusion Research Institute (NFRI)   ); 유석재    (National Fusion Research Institute (NFRI)   ); 김영민    (Korea Basic Science Institute (KBSI)  );
  • 초록

    Practical difficulties for preparing a good crosssectional specimen of GaN-based materials for transmission electron microscopy have arisen due to large difference of mechanical properties between hard ceramic substrate and soft GaN-layered materials. Uneven polishing, sudden cracking, delamination, and selective sputtering during the conventional wedge polishing technique are often encountered as experimental hindrances. The preparation technique based on Strecker's method can be applied to overcome these difficulties, which eventually leads to mechanically stable TEM samples independent of the mechanical properties of materials. The basic idea is to use hard ceramic dummy filler for embedding the sample of interest into the dummy frame. In this study, we applied this technique into preparing cross-sectional TEM specimen of the GaN-based materials with mechanical instability and demonstrated usefulness of this hard dummy filler method in which the possible modifications of the sample of interest during the preparation must be avoidable. In addition, practical precautions during the preparation were discussed.


  • 주제어

    Cross-section specimen .   GaN .   Thinfilm .   Hardness .   TEM.  

  • 참고문헌 (15)

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  • 이 논문을 인용한 문헌 (1)

    1. Kim, Jin-Gyu ; Oh, Sang-Ho ; Song, Kyung ; Yoo, Seung-Jo ; Kim, Young-Min 2010. "VirtualDub as a Useful Program for Video Recording in Real-time TEM Analysis" 한국현미경학회지 = Korean journal of microscopy, 40(1): 47~51     

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