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대기시간 제약을 고려한 반도체 웨이퍼 생산공정의 스케쥴링 알고리듬
A Scheduling Algorithm for Workstations with Limited Waiting Time Constraints in a Semiconductor Wafer Fabrication Facility

주병준    (LG전자 생산성연구원   ); 김영대    (한국과학기술원 산업및시스템공학과   ); 방준영    (한국과학기술원 산업및시스템공학과  );
  • 초록

    This paper focuses on the problem of scheduling wafer lots with limited waiting times between pairs of consecutive operations in a semiconductor wafer fabrication facility. For the problem of minimizing total tardiness of orders, we develop a priority rule based scheduling method in which a scheduling decision for an operation is made based on the states of workstations for the operation and its successor or predecessor operation. To evaluate performance of the suggested scheduling method, we perform simulation experiments using real factory data as well as randomly generated data sets. Results of the simulation experiments show that the suggested method performs better than a method suggested in other research and the one that has been used in practice.


  • 주제어

    Scheduling .   Semiconductor Wafer Fabrication .   Waiting Time Limit .   Tardiness.  

  • 참고문헌 (43)

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