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Journal of electrical engineering & technology v.7 no.3, 2012년, pp.396 - 400   SCIE
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Fabrication of Metal Nanobridge Arrays using Sacrificial Silicon Nanowire

Lee, Kook-Nyung    (Medical IT research center, Korea Electronics Technology Institute   ); Lee, Kyoung-Gun    (Medical IT research center, Korea Electronics Technology Institute   ); Jung, Suk-Won    (Medical IT research center, Korea Electronics Technology Institute   ); Lee, Min-Ho    (Medical IT research center, Korea Electronics Technology Institute   ); Seong, Woo-Kyeong    (Medical IT research center, Korea Electronics Technology Institute  );
  • 초록

    Novel fabrication method of nanobridge array of various materials was proposed using suspended silicon nanowire array as a sacrificial template structure. Nanobridges of various materials can be simply fabricated by direct deposition with thermal evaporation on the top of prefabricated suspended silicon nanobridge arrays, which are used as a sacrificial structure. Since silicon nanowire can be easily removed by selective dry etching, nanobridge arrays of an intended material are finally obtained. In this paper, metal nanobridges of Ti/Au, around 50-200 nm in thickness and width, 5-20 ${\mu}m$ in length were fabricated to prove the advantages of the proposed nanowire or nanobridge fabrication method. The nanobridges of Ti/Au after complete removal of sacrificial silicon nanowire template were well-established and bending of nanobridge caused by the tensile stress was observed after silicon removing. Up to 50 nm and 10 ${\mu}m$ of silicon nanowire in diameter and length respectively was also very useful for nanowire templates.


  • 주제어

    Metal nanobridge array .   Suspended nanowires .   Sacrificial silicon nanowires .   $XeF_2dry$ etching .   Nitride nanobridge.  

  • 참고문헌 (12)

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    5. M. Calleja, M. Tello, J. Anguita, F. Garcia, and R. Garcia, "Fabrication of gold nanowires on insulating substrates by field-induced mass transport,"Applied Physics Letters, vol. 79, Issue 15, pp. 2471-2473, 2001. 
    6. Z. L. Xiao, Catherine Y. Han, U. Welp, H. H. Wang, W. K. Kwok, G. A. Willing, J. M. Hiller, R. E. Cook, D. J. Miller, and G. W. Crabtree, "Fabrication of Alumina Nanotubes and Nanowires by Etching Porous Alumina Membranes,"Nano Letters, vol. 2 (11), pp. 1293-1297, 2002. 
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    11. Kook-Nyung Lee, Suk-Won Jung, Kyu-Sik Shin, Won-Hyo Kim, Min-Ho Lee, and Woo-Kyeong Seong, "Fabrication of suspended silicon nanowire arrays,"Small, vol. 4, Issue 5, pp. 642-648, 2008. 
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