Study on mechanical and electro-optical properties of ITO/CeO2 films deposited on PI substrate for flexible organic solar cells
ITO and ITO/CeO 2 films with various CeO 2 buffer layer thickness were deposited on flexible polyimide substrates by DC and RF magnetron bi-sputtering at 200 o C. The crystallinity of the ITO/CeO 2 films increased remarkably with increasing CeO 2 thickness from 0 to 7nm and the ITO/CeO 2 films showed a single (222)-oriented highly preferred structure. The resistivity of the ITO/CeO 2 films decreased with increasing CeO 2 buffer layer thickness due to the increase in crystallinity. The minimum resistivity of the ITO/CeO 2 film, 7nm in thickness, was 2.84x10 -4 Ωcm. A relatively small change in resistance in dynamic stress mode was observed for the ITO/CeO 2 film with a buffer layer thickness of 3nm.
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