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Sensors and actuators. A, Physical v.269, 2018년, pp.355 - 362   SCI SCIE
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Vertical growth of MoS2 layers by sputtering method for efficient photoelectric application

Kim, Hong-Sik (Department of Electrical Engineering, Incheon National University, 119 Academy Rd. Yeonsu, Incheon, 406772, Republic of Korea ) ; Kumar, Melvin David (Department of Physics, Aditanar College of Arts and Science, Tamil Nadu, 628216, India ) ; Kim, Joondong (Department of Electrical Engineering, Incheon National University, 119 Academy Rd. Yeonsu, Incheon, 406772, Republic of Korea ) ; Lim, Donggun (Department of IT Convergence, Korea National University of Transportation, 50 Daehak-ro, Chungju, Chungbuk 380702, Republic of Korea ) ;
  • 초록  

    Abstract The 2D layers of MoS 2 were deposited at RT, 200 °C and 400 °C over p-Si substrates using RF sputtering method. When the deposition temperature is increased beyond 200 °C, the MoS 2 layers were grown in vertical direction. XRD studies revealed that the prominent peak is shifted from 2θ = 24° to 13.5° and become narrow while increasing the temperature to 400 °C. The average absorption of 53.68% was exhibited by the sample deposited at 400 °C whereas it was reduced to 28.47% for the sample prepared at 200 °C. When the MoS 2 /p-Si photodetector was exposed to the red color wavelength, the high photocurrent of 130 μA was produced even at zero bias. The response and recovery times were measured as 38.78 μs and 43.07 μs respectively for λ ≈ 455 nm. The detectivity was found to be in the range of 109–1010 Jones. The proposed MoS 2 based photodetector is more beneficial in terms of quick transport of photogenerated carriers and fast response. The growth control and large-scale production of 2D materials would induce the enhanced photoelectric performances and practical device applications. Highlights 2D material was unformly grown onto 3 inch p-Si wafer by sputtering method. Temperature modulation controled the vertical growth direction of MoS 2 . The veritcal grown MoS 2 provided the singificantly enhanced photoresponses.


  • 주제어

    MoS2 .   Vertical growth .   RF sputtering method .   Temperature modulation .   Photoresponses.  

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