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Sensors and actuators. A, Physical v.269, 2018년, pp.91 - 98   SCI SCIE
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Micromachined microbeams made from porous silicon for dynamic and static mode sensing

Sun, Xiao (School of Mechanical and Chemical Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia ) ; Parish, Giacinta (School of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia ) ; Keating, Adrian (School of Mechanical and Chemical Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia ) ;
  • 초록  

    Abstract Through a controlled variation of the applied current during porous silicon formation, newly developed processes enable previously unattainable structural integrity of all-mesoporous silicon microelectromechanical systems (MEMS) structures. Such structures are desirable for applications such as sensing where the large surface area and low Young’s modulus of the high porosity layer enable ultra-high sensitivity detection of adsorbed species. In this work, micromachined all-mesoporous silicon microbeams were released, allowing both the dynamic and static sensing modes to be studied using such porous structures. Resonant frequencies (50–250kHz) of released doubly clamped porous silicon microbeams were measured, allowing mechanical properties to be extracted. Static mode sensing of vapour at the 1100ppm level was also performed, with the released porous silicon cantilevers showing a significant 6.5μm (3.7% of a 175μm beam length) and repeatable deflection after exposure. Highlights Released, all-mesoporous silicon MEMS structures with uniform porosity for sensing. High resonant frequency of released doubly clamped porous silicon microbeams. Static mode sensing of vapor with released porous silicon cantilevers. Ultra-high sensitivity detection of absorbed species.


  • 주제어

    Porous silicon .   Frequency .   Sensing .   vapour.  

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