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Sensors and actuators. B, Chemical v.259, 2018년, pp.1058 - 1065   SCI SCIE SCOPUS
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An FET-type gas sensor with a sodium ion conducting solid electrolyte for CO2 detection

Wu, Meile (Department of Electrical and Computer Engineering and Inter-University Semiconductor Research Center, Seoul Nation University, Seoul 151-742, Republic of Korea ) ; Shin, Jongmin (Department of Electrical and Computer Engineering and Inter-University Semiconductor Research Center, Seoul Nation University, Seoul 151-742, Republic of Korea ) ; Hong, Yoonki (Department of Electrical and Computer Engineering and Inter-University Semiconductor Research Center, Seoul Nation University, Seoul 151-742, Republic of Korea ) ; Jang, Dongkyu (Department of Electrical and Computer Engineering and Inter-University Semiconductor Research Center, Seoul Nation University, Seoul 151-742, Republic of Korea ) ; Jin, Xiaoshi (College of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China ) ; Kwon, Hyuck-In (School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-756, Republic of Korea ) ; Lee, Jong-Ho (Department of Electrical and Computer Engineering and Inter-University Semiconductor Research Center, Seoul Nation University, Seoul 151- ) ;
  • 초록  

    Abstract In this paper, a Field-Effect-Transistor (FET)-type gas sensor using the composite of Na 2 CO 3 and NaNO 2 as the sensing material is investigated. The sensor has a floating gate (FG) passivated by an insulator stack and a control gate (CG), which are formed in an interdigitated form in a horizontal direction. The inkjet printing process forms the sensing material on the interdigitated FG and CG. Just before forming the sensing material, a (3-aminopropyl) triethoxysilane (APTES) monolayer is formed to prevent diffusion of Na + ions contained in the sensing material through the insulator layer. The sensor can be electrically programmed like a typical memory device due to the FG, which makes the calibration of the sensor possible. CO 2 gas sensing properties of the sensor are characterized at an operating temperature of 160 °C. The results indicate that the proposed sensor produces a reasonable and repeatable response to a certain concentration of CO 2 . Highlights A programmable FET-type CO 2 sensor with a Na+ solid electrolyte is proposed. The proposed sensor has reasonable and repeatable response to CO 2 at 160 °C. An APTES monolayer effectively prevents Na+ ions diffusing through insulators. The sensing principle is explained and modeled based on electrochemical theory.


  • 주제어

    FET-type sensor .   APTES .   Inorganic solid electrolyte .   Inkjet printing .   CO2.  

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