An FET-type gas sensor with a sodium ion conducting solid electrolyte for CO2 detection
Abstract In this paper, a Field-Effect-Transistor (FET)-type gas sensor using the composite of Na 2 CO 3 and NaNO 2 as the sensing material is investigated. The sensor has a floating gate (FG) passivated by an insulator stack and a control gate (CG), which are formed in an interdigitated form in a horizontal direction. The inkjet printing process forms the sensing material on the interdigitated FG and CG. Just before forming the sensing material, a (3-aminopropyl) triethoxysilane (APTES) monolayer is formed to prevent diffusion of Na + ions contained in the sensing material through the insulator layer. The sensor can be electrically programmed like a typical memory device due to the FG, which makes the calibration of the sensor possible. CO 2 gas sensing properties of the sensor are characterized at an operating temperature of 160 °C. The results indicate that the proposed sensor produces a reasonable and repeatable response to a certain concentration of CO 2 . Highlights A programmable FET-type CO 2 sensor with a Na+ solid electrolyte is proposed. The proposed sensor has reasonable and repeatable response to CO 2 at 160 °C. An APTES monolayer effectively prevents Na+ ions diffusing through insulators. The sensing principle is explained and modeled based on electrochemical theory.
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